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Scintillation SE Detector for VP SEM
Kozelský, Adam ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains description of basic properties and principles of electron microscopy focused on scanning electron microscopy. It describes construction solutions of a microscope, interaction between electron beam and sample, generation of backscattered and secondary electrons. Next chapters are dealing with development of electron microscopy and environmental scanning electron microscopy. The experimental part of this thesis is focuses on the detection of secondary electrons with scintillation detector in environmental scanning electron microscope at higher pressure in the specimen chamber. Concretely is focused on optimization of collecting grid voltage and measurement of pressure dependences.
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Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
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Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
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|
|
Voltage contrast method in ESEM
Krňávek, Martin ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains theoretical description of basic features and principles of electron microscopy, with focus on environmental scanning electron microscopy. It describes function of the microscope, interactions that takes place after collision of electron pack with a sample, mainly it describes creation of back reflected electrons and secondary electrons and methods of voltage contrast. The practical part focus on voltage contrast issue by observing decomposition of electric potentials on surface of semiconductor devices and it establishes ideal working conditions for observing voltage contrast by scintillation detector of secondary electrons.
|
|
|
Scintillation SE Detector for VP SEM
Kozelský, Adam ; Čudek, Pavel (referee) ; Jirák, Josef (advisor)
This work contains description of basic properties and principles of electron microscopy focused on scanning electron microscopy. It describes construction solutions of a microscope, interaction between electron beam and sample, generation of backscattered and secondary electrons. Next chapters are dealing with development of electron microscopy and environmental scanning electron microscopy. The experimental part of this thesis is focuses on the detection of secondary electrons with scintillation detector in environmental scanning electron microscope at higher pressure in the specimen chamber. Concretely is focused on optimization of collecting grid voltage and measurement of pressure dependences.
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